Stochastic analysis of surface metrology
نویسندگان
چکیده
منابع مشابه
Surface metrology
Some important types of instrumentation for measuring surfaces both past and present are reviewed. Exhaustive lists of instruments and performance are not presented; rather more emphasis is placed on the philosophy of measurement. An attempt is made to classify the surface features and also the function of surfaces as a pre-requisite to measurement. It is revealed that, as the push towards mini...
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Accepted Manuscript is “the version of the article accepted for publication including all changes made as a result of the peer review process, and which may also include the addition to the article by IOP Publishing of a header, an article ID, a cover sheet and/or an ‘Accepted Manuscript’ watermark, but excluding any other editing, typesetting or other changes made by IOP Publishing and/or its ...
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ژورنال
عنوان ژورنال: Optical Engineering
سال: 2019
ISSN: 0091-3286
DOI: 10.1117/1.oe.58.8.084101